In 2023, Yongying Chemical International (Hong Kong) Co., Ltd. successfully introduced Zhejiang Aina's latest VPD-ICPMS fully automatic integrated machine. VPD (volatile organic compound pretreatment device) integrated with Agilent ICPMS is an advanced fully automatic integrated detection equipment designed to minimize the introduction of external contamination during the test and analysis process
In 2023, Yongying Chemical International (Hong Kong) Co., Ltd. successfully introduced Zhejiang Aina's latest VPD-ICPMS fully automatic integrated machine. VPD (volatile organic compound pretreatment device) integrated with Agilent ICPMS is an advanced fully automatic integrated detection equipment designed to minimize the introduction of external contamination during the test and analysis process. The introduction of this equipment marks a new level of Yongying Chemical's detection capabilities in the fields of wafers, gases and chemicals.
As the feature size of integrated circuit (IC) devices continues to shrink, advanced processes have put forward higher requirements for the control level of ultra-trace metal ions on the wafer surface. According to statistics, more than 50% of the yield losses caused by non-visual defects in semiconductors during IC chip manufacturing are related to metal contamination. In response to this challenge, Zhejiang Aina has developed metal contamination detection equipment, ion contamination detection equipment and organic contaminant detection equipment with internationally leading technology to solve the stringent pollution control needs in IC manufacturing.
The VPD-ICPMS fully automatic integrated machine provided by Zhejiang Aina is particularly suitable for detecting metal contaminants on wafer surfaces and other related fields. Its core advantage lies in the integration of a 24-hour unattended fully automatic real-time continuous testing system, which further improves the detection capability and efficiency. The integrated integration technology directly delivers the test liquid to the ICP-MS through a closed system, minimizing the possibility of contamination and ensuring the high accuracy and reliability of the test results.
Yongying Chemical has always been committed to providing customers with the best solutions. The Ena advanced semiconductor wafer metal contaminant testing system introduced this time can provide customers with an integrated monitoring solution, ensure the strictness of quality management, and escort customers' high-end manufacturing. This new technology investment not only highlights Yongying Chemical's rigorous attitude towards quality control, but also a breakthrough in the company's advanced process contamination control field.